Precision Motion Technologies - PIHera™ Family of Piezo Flexure Nanopositioning Systems, Closed-Loop, Direct Metrology: P-620.1

Single-axis PIHera® systems are piezo-nanopositioning stages featuring travel ranges from 50 to 1800 μm. Despite the increased travel ranges, the units are extremely compact and provide rapid response and high guiding precision. This and the long travel range is achieved with a friction-free and extremely stiff flexure system.

• XY-Travel to 1800 µm
• Compact Design
• Resolution <1 Nanometer
• Frictionless Precision Flexure Guiding System
• PICMA® High-Performance Piezo Drives
• Direct Metrology with Capacitive Sensors for Highest Precision
• Up to 0.02% Position Accuracy
• X, XY, Z, XYZ Versions
• Vacuum-Compatible Versions

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PI is a leading manufacturer of precision motion control equipment, piezo motors, air bearing stages and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with twelve subsidiaries, R&D / engineering on 3 continents and total staff of 950+.

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