The holographic MEMS analyzer solution provides time sequences of the successive 3D topographies of a MEMS along its driving signal. This unique set of data contains an unrivalled wealth of information. In particular, in- and out-of-plane displacements and frequency response can be analyzed at any location within the measurement field of view.

A non-scanning method for reduced characterization time
Efficient comparison between simulations and micro-manufactured devices
Measurement of samples that cannot be characterized with other techniques.