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  • Park XE-3DM

Park XE-3DM

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  • Park Systems,Park Systems Corp.
  • Park XE-3DM
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Contact Details

  • Park Systems Corp.
  • Park Systems
  • 3040 Olcott St.
  • Santa Clara
  • CA
  • United States
  • +1-408-986-1110
  • http://www.parkafm.com/
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  • Park Systems,Park Systems Corp.
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  • Park Systems has introduced the revolutionary XE-3DM, the completely automated AFM system designed for overhang profiles, high-resolution sidewall imaging, and critical angle measurements. With the patented decoupled XY and Z scanning system with tilted Z-scanner, it overcomes the challenges of the normal and flare tip methods in accurate sidewall analysis. In utilizing our True Non-Contact Mode™, the XE-3DM enables non-destructive measurement of soft photoresist surfaces with high aspect ratio tips.

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  • Park Systems – Enabling Nanoscale Advances

    Park Systems serves its customers with a complete range of AFM solutions including AFM systems, options, and software, along with global service and support.

    Park Systems provides original and innovative AFM solutions for the most accurate nanoscale measurement. In nanoscale metrology, having data that is repeatable, reproducible, and reliable is just as crucial as resolution. The innovative crosstalk-elimination (XE) metrology platform ushered in a new era of nanometrology that overcomes non-linearity and non-orthogonality associated with conventional piezotube based systems. Park Systems' innovative AFM technology is a disruptive market force and it expands the application of nanometrology beyond the limits of conventional AFM technology.

    Park Systems promotes sustainable, long-term growth of its AFM business by constantly seeking to address the changing needs of AFM users. Our comprehensive portfolio of products, software, services, and expertise is designed and engineered to help customers achieve the nanometrology performance that meets the needs and requirements of present and future applications. Since improvements in nanometrology today are key to enabling tomorrow's research, analysis, processing and product manufacturing, our innovative technology and market leadership in the field of nanometrology secure our future at the forefront of the AFM industry.


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